Britney gave bits with 'Toxic' then Rihanna was the leader with 'SOS' evolving to 'Don't Stop The Music' and establishing with 'Disturbia'. Britney followed with 'Womanizer'. Then Lady Gaga took over and made everyone do it.
Probably the trend started after Blackout came out. I mean, we had other electro-pop albums prior to Blackout (i.e. Hilary Duff's flawless Dignity, JT's F/L, and some other stuff), but I think it all went in to become a trend after Blackout was released.